RF Plasma Generator
-600 Watts, 13.56MHz
-Compact, air-cooled half-rack case
-Interfaces: Front panel display and active controls, 25-pin analog port, RS-232 serial port (programming guide available), GUI app
-Superior output performance, guaranteed reliability
-Applications: PECVD, HDPCVD, PVD, ALD, Plasma Cleaning/Etching for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs, MEMs
-Source or bias generators for continuous operation or stand-alone batch tools
Sale!
AG 0613 – RF Power Generator
Original price was: $7,519.00.$6,019.00Current price is: $6,019.00.
+ Free ShippingRF Plasma Generator
-600 Watts, 13.56MHz
-Compact, air-cooled half-rack case
-Interfaces: Front panel display and active controls, 25-pin analog port, RS-232 serial port (programming guide available), GUI app
-Superior output performance, guaranteed reliability
-Applications: PECVD, HDPCVD, PVD, ALD, Plasma Cleaning/Etching for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs, MEMs
-Source or bias generators for continuous operation or stand-alone batch tools
Availability: 2 in stock
| Frequency | 13.56MHz |
|---|---|
| Power Level | 120W, 300W, 600W, 1000W+ |
